Dark Space Shields

There are a lot of reasons why there may be an arcing problem during the plasma deposition process during sputtering. During the sputtering process a gas, typically argon unless a reactive deposition is required, is transformed from a neutral state or insulating state...

Arching Concerns When Sputtering SiO2

Recently a customer asked about continuously running an SiO2 Sputtering Target and specifically concerns about arcing. There is always going to be some “re-deposition” onto a sputtering target where stray molecules that have been knocked off the target...

Proper Handling of PVD Materials

Just a few things to mention here regarding the proper procedural handling of sputtering targets and evaporation materials. Most deposition materials are fairly robust but, depending on the specific composition or Stoichiometry, some can be quite fragile, some can be...

Preconditioning Ceramic Targets

The issue that I am trying to address here is a customer’s request for information on the proper procedure on how to precondition and operate an IGZO i.e. In2O3/Ga2O3/ZnO 1:1:1: At % sputtering target configuration with a standard (extended) Semicore Equipment,...

Arching Problems in the Plasma

“Arcing” is quite often an issue with any sputtering process and can lead to disastrous results if not properly maintained or, more preferably, eliminated. When we say “arcing” we are referring to the electrical potential applied to the...

Sputtering with Metallically Bonded Segmented Targets

At the Materials Research Society (MRS) Spring Conference in San Francisco the other day an attendee stopped by our Trade Show Booth in the Exhibition Hall at the Moscone Center where we had on display a multi piece linear target bonded to a copper backing plate and...

Reclamation Value of Spent Precious Metal Targets

Just a quick note to our customers out there, and potential customers, to consider the reclamation value of the “Spent Target” and scrap material when calculating the overall cost of depositing Thin Films when utilizing targets containing precious metals....

Metallic Bonding of Sputtering Targets

Quite often we are asked, “Does this target require a backing plate?”. Unfortunately, sometimes we are not asked, even when we should be. So let’s address the issue here, even though the answer is not quite so straight forward. Certain sputtering...