Proper Handling of PVD Materials

Just a few things to mention here regarding the proper procedural handling of sputtering targets and evaporation materials. Most deposition materials are fairly robust but, depending on the specific composition or Stoichiometry, some can be quite fragile, some can be...

Preconditioning Ceramic Targets

The issue that I am trying to address here is a customer’s request for information on the proper procedure on how to precondition and operate an IGZO i.e. In2O3/Ga2O3/ZnO 1:1:1: At % sputtering target configuration with a standard (extended) Semicore Equipment,...

Arching Problems in the Plasma

“Arcing” is quite often an issue with any sputtering process and can lead to disastrous results if not properly maintained or, more preferably, eliminated. When we say “arcing” we are referring to the electrical potential applied to the...

Sputtering with Metallically Bonded Segmented Targets

At the Materials Research Society (MRS) Spring Conference in San Francisco the other day an attendee stopped by our Trade Show Booth in the Exhibition Hall at the Moscone Center where we had on display a multi piece linear target bonded to a copper backing plate and...

Reclamation Value of Spent Precious Metal Targets

Just a quick note to our customers out there, and potential customers, to consider the reclamation value of the “Spent Target” and scrap material when calculating the overall cost of depositing Thin Films when utilizing targets containing precious metals....

Metallic Bonding of Sputtering Targets

Quite often we are asked, “Does this target require a backing plate?”. Unfortunately, sometimes we are not asked, even when we should be. So let’s address the issue here, even though the answer is not quite so straight forward. Certain sputtering...

Breaking in a New Sputtering Target

The issue of how to condition or “Break In” a new sputtering target to prepare it for continuous use during plasma deposition has come up numerous times over the years, so I thought I should probably address it here once and for all. In general, a new...

Electron Beam Deposition of Al Vs. Au

We recently had an interesting question from a student at one of the local universities. The student wanted to know what differences he might expect if he were to change from evaporating Aluminum in his Electron Beam Source to Gold when depositing on to a plastic...